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CNS Nanomaterial Facility

Location: Center for Nanoscale Systems, Harvard University, 11 Oxford Street, LISE Building, Cambridge, MA 02138


Center for Nanoscale Systems facility dealing with "FIB, XPS, AFM, Optical Microscopy and Spectroscopy, Biomaterials, Soft Lithography, Microfluidics, Nano Particles, Chemical Nanotechnology, etc."





    • AB-M mask aligner ( Mask aligner )

      "This mask alignment and exposure system has a table-top configuration and offers Mid UV and Deep UV (248nm with filter change) exposure capabilities. It is a contact aligner with precision x, y, z and substrate rotation controls. It has a single-field high magnification zoom microscope for alignment. We provide three circular vacuum chucks for 2", 3" and 4" wafers, as well as a rectangular chuck for small samples, with Wedge Compensation (Planarizing) feature. The aligner has two mask holders for 4"x4" and 5"x5" sized masks, ideal for 3" and 4" wafers respectively. The minimum feature size that can be achieved on this system is about 2 micrometers. (However the practical limit will ultimately depend on the mask resolution, the photoresist type, thickness and uniformity, and the level of contact between the photoresist layer and the mask.)"

    • Anatech LTD SP100 plasma barrel etcher ( Plasma etcher )

    • Asylum MFP-3D Coax atomic force microscope ( Atomic force microscope )

      "The MFP-3D Coax AFM is a high-performance Atomic Force Microscope (AFM) designed for different research applications, including physics, materials science, polymers, chemistry, nanolithography, bioscience, and quantitative nanoscale measurements. It is a versatile AFM that combines molecular resolution imaging and pN force-based measurements on an inverted fluorescent optical microscope with a high speed camera. Combined with its ultra-low noise performance and unprecedented precision and accuracy, the MFP-3D Coax has raised the bar for AFM instrumentation in different CNS research areas."

    • Beckman Coulter DelsaNano C particle size and zeta potential analyzer ( Dynamic light scattering instrument photon correlation spectrometer )

      "DelsaNano C is a photon correlation spectroscopy (PCS) instrument, which determines particle size by measuring the rate of fluctuations in laser light intensity scattered by particles as they diffuse through a fluid. For measuring the zeta potential, it determines electrophoretic movement of charged particles under an applied electric field. The DelsaNano also can measure zeta potential (or surface charge) of a solid surface or film."

    • Contact angle measurement system ( Goniometer )

      "Contact angle measurement allows users to characterize the hydrophobicity or hydrophilicity of a surface. The technique can be used to calculate the surface free energy of a sample. Contact angle measurements are often used to help characterize samples after surface treatments such as O2 plasma treatment. It is useful in adhesion studies. A surface with a higher surface free energy will generally have better adhesion properties.

      A home built system that captures a digital image of the droplet and then uses an ImageJ plug-in to analyze the contact angle."

    • Countess cell counter ( Automatic cytometer )

      "The Countess Automated Cell Counter offers easy and accurate cell counting and viability counts. You can get all the data you need about your cell cultures in just 30 seconds without using a hemocytometer. The disposable Countess Cell Counting Chamber Slides are designed for use with this tool. Each slide contains two cell counting chambers."

    • DISCO DAD-321 automatic dicing saw ( Saw )

      "DISCO DAD-321 dicing saw uses a rotating ultra-thin diamond impregnated blade, in a wet environment, to cut materials such as silicon wafers, III-V semiconductors, glass sheets, ceramic, etc. into almost any shapes with straight edges. Cutting process is controlled automatically through software recipe programming. The machine is also capable of accurate, multi-directional on-screen semiautomatic alignment."

    • K-Alpha XPS (ESCA) ( X-ray photoelectron spectrometer )

      "Thermo Scientific K-Alpha is a fully integrated, monochromated small-spot X-ray Photoelectron Spectrometer (XPS) system. K-Alpha is designed for a multi-user environment and is the first XPS tool to deliver a fully automated workflow from sample entry to report generation. The latest revision of the K-Alpha platform features dramatically improved spectroscopic performance, delivering higher countrates, faster analysis times and improved chemical detectability. Analytical options now include a tilt module for ARXPS data collection and a recirculating inert-gas glove box for transfer of air-sensitive samples. Combining monochromated XPS performance with intelligent automation and intuitive control, K-Alpha is designed for a multi-user environment to meet the requirements of both experienced XPS analysts and newcomers to the technique.

      ■ Analyser–180° double focussing hemispherical analyser–128-channel detector
      ■ X-ray source–Al Ka micro-focused monochromator–Variable spot size (30-400µm in 5µm steps)
      ■ Ion Gun–Energy range 100-4000eV
      ■ Charge Compensation–Dual beam source–Ultra-low energy electron beam
      ■ Sample Handling–4-axis Sample Stage–60 x 60mm sample area–20mm maximum sample thickness
      ■ Vacuum System–2x 220 l/s turbo molecular pumps for entry & analysis chambers–Auto-firing, 3 filament TSP
      ■ Data-system–Avantage data system–Processing licence–PC
      ■ Options–Tilt module for ARXPS-Inert-gas glove box for air-sensitive sample handling"

    • KLA-Tencor P-16+ contact stylus profiler ( Profilometer )

      "The KLA-Tencor P-16+ is a contact stylus-type surface profiler, which is capable of being utilized in a wide range of applications. It delivers automated step height, surface contour, waviness and roughness measurements with detailed 2D or 3D analysis of topography for a variety of surfaces and materials, including soft materials like polydimethylsiloxane (PDMS). It uses a diamond stylus for advanced profiling applications on a Windows XP operating system. It has a Microhead with an extended vertical range of 1 mm, stylus force as low as 0.5 mg, and extended scan length of 200mm. P-16+ offers top and side view optics, allowing the operator to automatically switch between a top-down view for fast stylus positioning and navigating over the sample, and an angled view for easy monitoring of the stylus as it scans over target features."

    • Milton Roy Abbe 3L refractometer ( Abbe refractometer )

      "Abbe 3L refractometer to measure the index of refraction of aqueous solutions between n=1.3 and n=1.7."

    • Nikon Eclipse ME600L optical microscope with CCD camera ( Optical microscope )

      "Reflective and transmitted light, DIC, 5,10,20,40x objectives with DIC. With DXM1200 camera and Dell PC."

    • NuAire Nu-425 bio-hood ( Biological safety cabinet )

    • OAI LS30 UV flood exposure system ( Light source )

      "The OAI LS 30 UV flood exposure system is a 350 W near-UV stand-alone light source system, which provides highly collimated and uniform beam of 6" diameter. The divergence half-angles are less than 2.6 degrees. The light source's intensity is operator-adjustable over a wide range. It has two operating modes: Constant Intensity Mode and Constant Power Mode."

    • Retsch PM 100 planetary ball mill ( CNC milling machine )

      "Retsch PM 100 planetary ball mill is part of the Nanopartciles Facility located in LISE G06 - Chemical Nanotechnology Laboratory. This ball mill pulverizes and mixes soft, medium-hard to extremely hard, brittle and fibrous materials. It is mainly used for making micro- and nanoparticle powders from bulk samples. Other applications include pulverizing, mixing, homogenizing, colloidal milling, and mechanical alloying."

    • Spectro Xepos III x-ray flourescence spectrometer ( X-ray fluorescence detector )

      "X-rays excite the atoms of the sample to emit radiation. This radiation is measured by a semiconductor detector. To achieve a higher sensitivity, the exciting radiation can be optimized by using targets. The unit is delivered including a prepared analysis method. Data are already stored in the unit's memory. The measured values are compared with these data. After the measurement is complete, the results relating to an unknown sample are displayed on the screen. The sample material can be solid, liquid or a powder."

    • Structure Probes Plasma Prep II 02 surface treatment system ( Plasma etcher )

      "Surface treatment or surface cleaning tool using oxygen process. Working pressure = 250 mTorr."

    • Thermo Electro Legend centrifuge ( Centrifuge )

    • Thermo Electron 7402 cryo-chamber ( Environmental chamber )

    • Thermo Electron mammalian CO2 culture incubator ( CO2 incubator )

      "One stack of two incubators for mammalian cell culture. Connected to CO2 manifold.

      Direct heat for regular sterilization cycles; 6.5 cu. ft. chamber volume; Digital temperature control and relative humidity sensor. In-chamber HEPA filter."

      The lab contains four of these instruments.

    • Thermo Scientific Nicolet ECO 1000 Fourier Transform infrared spectrometer ( Fourier transform infrared spectrometer )

      "The Nicolet ECO 1000 is a high-performance Fourier Transform infrared (FT-IR) spectroscopy instrument designed to serve the semiconductor manufacturing industry. It can be used for measuring dopant concentration levels in dielectric films (BPSG, PSG, FSG, etc.), hydrogen levels in silicon nitride films, epitaxial film thickness, MEMS device thickness, and substitutional carbon and interstitial oxygen levels in silicon wafers. The ECO 1000 can be used with wafers ranging from 100 mm (4-inch) to 200 mm (8-inch) in diameter. The system is capable of centering and aligning these standard wafer sizes automatically, providing accurate and repeatable sampling anywhere on the surface of the wafer. 75 mm (3-inch) wafers can be used as well, but with only very limited positioning freedom and no centering and aligning capability. The system can also be used to analyze non-semiconductor samples (except liquids, gases and powder), as long as the samples can be easily mounted on a custom-made sample holder and fed into the instrument. The source of laser energy in the ECO 1000 analyzer is a Melles Griot HeNe laser with a nominal 1 mW(maximum 1.2 mW), continuous 632.8 nm laser head. The system has two modes for FT-IR measurements: reflection and transmission."

    • Thinky ARE-250 centrifugal mixer ( Planetary mixer )

    • VersaLaser VLS2.32 cutting/engraving system ( Laser cutter )

      "In essence, the VersaLaser is a high-precision plotter controlled by a PC, where the pen of the plotter was replaced by a thin powerful laser beam for cutting and engraving. It acts as a true plug and play computer peripheral and has a friendly, materials-based print driver that eliminates complex power, speed and materials calculations. With the available High Power Density Focusing Optics accessory, the system achieves dramatically improved resolution for applications requiring extremely fine detail, such as microfluidic devices made of plastic laminates. It will allow our users to design and fabricate new microfluidic devices in a matter of hours in a three step process: 1) draw layers of a microfluidic device on a vector drawing program such as CorelDraw; 2) cut the layers from adhesive polymeric laminates using the VersaLaser; 3) stack up and press the layers together to create the device. Feature sizes of 100 microns or even less can be achieved with this technique."

    • VirTis AdVantage Plus EL-85 freeze dryer / lyophilizer ( Lyophilizer )

      "A bench-top system with features and performance usually found in larger production-scale systems. It can attain minimum shelf and condenser temperatures of -55C and -85C, respectively. The two internally-cooled shelves, which can be heated up to +60C as well, provide ample space for multiple samples to be processed simultaneously. The cooling system provides temperature uniformity of ±1.0C. This freeze dryer has both manifold and tray type drying capability. The integrated Wizard™ 2.0 Controller features large 16 line by 35 character backlit display and synoptic screen to enable precise control and monitoring of freeze drying process. User-friendly menu options and the ability to store up to 16 programs provide maximum convenience and can save advanced users valuable time. Overnight recipes can be easily programmed for extended hands-off processing of the samples. This freeze dryer is available mainly to our Nanoparticle Facility users to freeze-dry their nanoparticle suspensions. However, users with other applications (e.g. lyophilization of proteins, gels or other materials) can apply to get permission and training to use it as well."

    • WITec CRM 200 AFM/NSOM/confocal raman microscope ( Raman confocal microscope )

      "The Alpha300 is a user friendly Near-field Scanning Optical Microscopy (NSOM) that combines in a unique way the advantages of NSOM, Confocal Raman Microscopy and Atomic Force Microscopy in a single instrument. By simply rotating the objective turret, the user can choose from Confocal Microscopy, NSOM or AFM.

      For NSOM, the alpha300 uses unique micro-fabricated SNOM-cantilever sensors for optical microscopy with spatial resolution below the diffraction limit. All standard optical modes such as transmission, reflection and fluorescence are available.

      The Alpha300-Confocal Raman Microscope offers the unique ability to acquire chemical information non-destructively with a resolution down to the optical diffraction limit (~ 200 nm). Due to the confocal setup, it is not only possible to collect information from the sample surface, but also to look deep inside transparent samples and even obtain 3D information.

      The Alpha300 integrates an AFM system with a scientific grade optical microscope for superior optical access and high-resolution sample survey. More specifically, the Digital Pulsed Force Mode in AFM, allowing local surface properties such as local adhesion or stiffness to be imaged along with topography on the nanometer scale."

    • X-Tek HMXST micro-CT x-ray imaging system ( X-ray source )

      "The HMXST Micro-CT x-ray imaging system produces three dimensional images of biological, art, minerals and electronic component materials. The x-ray cabinet accommodates specimens up to 8inchx8inch maximum cross section. The system is outfitted with an open source x-ray tube that has a maximum resolution of 3-5 microns in reflection mode and 2 microns in transmission mode. The system has a Mo, W, Ag, and Cu x-ray targets. A Perkin Elmer 1621 x-ray panel provides 2000x2000 pixel 16inchx16inch field of view with 7.5 frames per second readout and a physical pixel size of 200 microns. The micro-CT computer system consists of three 64 bit computers and software consisting of (1) control and data acquisition, (2) three-dimensional reconstruction, and (3) a visualization station."

    • Xerox 8570 Wax Printer ( Solid ink printer )

      "Solid ink printer is used to fabricate paper-based microfluidic devices. Ink droplet is about 50 to 60 um in diameter. Ink is compatible with aqueous solution with various pH.

      Whatman No. 1 chromatography paper is provided by CNS."

    • Zeiss SMT NVision40 focused ion beams (2x) ( Scanning electron microscope )

      "The NVision 40 Dual-Beam focused ion beam and scanning electron microscope is available to perform direct etching and milling of patterns."

      The lab has two of these instruments.


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    Last updated: 2019-01-17T09:48:38.126-05:00

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    The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016