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Technics Plasma etcher
eagle-i ID
http://harvard.eagle-i.net/i/0000012b-00c3-8c02-db6e-7a3f80000000
Resource Type
Properties
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Resource Description
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Includes photoresist stripping; surface modification.
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Manufacturer
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Technics
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Model Number
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500-II
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Location
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HMS Microfluidics/Microfabrication Core Facility
Harvard University
