The HMS Microfluidics Facility aims to make the tools of Microfabrication and Microfluidics available to all HMS users.
XP-1 High Resolution Surface Profiler; Stylus-Type Profilometer.
Integrated in the wetbench.
Used with Motic MGH 100B microscope
Part of alignment bonder.
Infinity corrected PlanE PI Brightfield/darkfield Old Objectives, PlanE PIB D5X/0.10W, .D.1 7.0mm, PlanE PIB D10X/0.25W, .D.7 .48mm,P lanE PIB D20X/0.40, W.D.5 .20mmP, lanE PIB D50X/O.7W5,. D.0 .38mm
Equipped with Jenoptik ProgRes C5
Attached to Leica Microscope.
Photoresist development; lift-off process; for acid process, please contact facility staff for assessment.
Top-side alignment Exposure resolution of 0.8um (optimal) Alignment resolution of 0.25um Up to 3" wafer process.
Includes photoresist stripping; surface modification.
Mixer and Degassing Machine Conditioning Planetary Mixer.
Protocol for producing passivation of the surfaces to aid release from PDMS and prevent the PDMS form adhering to the master.
"The most widely adopted method for making Microfluidics devices for chemical and biological applications is named soft-lithography, a Microfabrication process combining photolithography and micro-molding techniques using a soft, biocompatible, polymeric material – PDMS (polydimethylsiloxane). The Microfabrication room of our facility offers all the equipment and tools needed for photolithography and soft-lithography process."
The lab will perform this service for investigators or trained users may use the equipment and facilities themselves. See the guidelines on the website for details.
Includes seminars and workshops, as well as individual training. See website for details.