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Wafer cleaning protocol

eagle-i ID


Resource Type

  1. Protocol


  1. Additional Name
    Piranha clean protocol
  2. Used by
    HMS Microfluidics/Microfabrication Core Facility
  3. Website(s)
Provenance Metadata About This Resource Record

Copyright © 2016 by the President and Fellows of Harvard College
The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016